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发明名称
SEM PROVIDED WITH AN ELECTROSTATIC OBJECTIVE AND AN ELECTRICAL SCANNING DEVICE
摘要
申请公布号
EP0968517(A1)
申请公布日期
2000.01.05
申请号
EP19980957066
申请日期
1998.12.14
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
KRANS, JAN, M.;KRIJN, MARCELLINUS, P., C., M.;HENSTRA, ALEXANDER
分类号
H01J37/147;H01J37/28;(IPC1-7):H01J37/28
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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