| 摘要 |
PROBLEM TO BE SOLVED: To provide a sucking member for sucking and holding a sucked body, wherein the occurrence of particles is small. SOLUTION: The sucking member 10 has many support projection portions 2 formed on the top surface of a base 1, each of the support projection portions 2 having a protective layer 5 formed on a surface of the base 3 in a circular cone shape so that a top-surface center portion of the base 3 is a small projection portion 4. Consequently, the base 3 and the small projection portion 4 comprising the protective layer 5 is tightly brought into contact with each other, and particles produced by peeling the protective layer 5 can be reduced as much as possible. COPYRIGHT: (C)2009,JPO&INPIT |
