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发明名称
Illumination apparatus and exposure apparatus
摘要
申请公布号
EP0849637(A3)
申请公布日期
2000.01.05
申请号
EP19970120462
申请日期
1997.11.21
申请人
NIKON CORPORATION
发明人
TANITSU, OSAMU
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
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地址
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