| 摘要 |
PROBLEM TO BE SOLVED: To obtain a piezoelectric actuator producing a large displacement and having a wide application. SOLUTION: A plurality of unimorph type diaphragm 1 formed by bonding a rectangular metal plate 3 to an electrode on one side of rectangular piezoelectric plate 2 are laminated in the thickness direction, and the end parts 3a, 3b in the length direction of the metal plates 3 of respective diaphragms 1 are connected alternately to obtain a bellows structure. When a DC field is applied between a lead wire 4 connected with the electrode on the other side of the piezoelectric plate 2 and the metal plate 3, the piezoelectric plate 2 extend or contracts in the length direction to generate a warp (displacement) in the diaphragm 1. Since the diaphragm 1 is cantilevered, displacement thereof can be increased. Since total displacement of the diaphragms 1 at respective stages can be obtained between the end part of the diaphragms 1 at the uppermost and lowermost stages, a large displacement can be obtained. |
