发明名称 ILLUMINATION TECHNIQUES FOR OVERCOMING SPECKLE ARTIFACTS IN METROLOGY APPLICATIONS
摘要 <p>A method and apparatus for converting a beam of light that is substantially coherent and has a coherence length into substantially incoherent radiation. The method has the steps of collimating the beam, delaying a first portion of the beam by a first optical delay by ballistic passage through a first cell of an optical element, and delaying each of a plurality of other portions of the beam by an optical delay different from the first optical delay by an amount exceeding the coherence length of the beam.</p>
申请公布号 WO1999064916(A1) 申请公布日期 1999.12.16
申请号 IL1999000282 申请日期 1999.05.27
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