| 摘要 |
A system for applying recipes of semiconductor manufacturing apparatuses includes a plurality of apparatus controllers respectively arranged for semiconductor manufacturing apparatus, a host computer commonly connected to the apparatus controllers to store process recipes, and a group controller which is commonly connected to the apparatus controllers through a channel different from channels which connect the apparatus controllers to the host computer, and is connected to the host computer through a dedicated channel to directly exchange information with the host computer. The host computer sends process recipes to the respective apparatus controllers, writes/reads out a recipe in/from the group controller through the dedicated channel, and reads out a recipe history therefrom through the dedicated channel. The apparatus controllers respectively operate the semiconductor manufacturing apparatuses on the basis of the process recipes sent from the host computer. The group controller stores a history of a process recipe used by the semiconductor manufacturing apparatus.
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