| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput processing capability by providing the mechanism in which two condensing spots are obtained by bisecting laser beams and a bump rack pitch, that is obtained on the surface of a disk in its radial direction, is set arbitrarily. SOLUTION: Laser light beams 2, emitted from a Q switch pulse oscillating type laser oscillator 1, are passed through an expander mirror 3, reflected by a bending mirror 4, made incident on a beam splitter optical system 9, bisected by a half mirror 14, irradiated on a disk 6 as condensed light spots 11 and 10 by processing lenses 18 and 20 and bumps are formed. Thus, the throughput processing capability, that is determined by the repetitive frequency of a Q switch, is practically doubled by bisecting the laser light beams and arbitrarily varying a bump rack pitch Pr. For example, in order to set the bump pitch (radial direction Pr circumferential direction Pθ) to 40μm/40μm, an rotating angleθis adjusted so as to make Pr=40μm and the amount of the movement for an X stage 8 is set to an 80μm pitch.
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