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发明名称	WAFER CLEANING DEVICE
摘要
申请公布号	JPH11340178(A)	申请公布日期	1999.12.10
申请号	JP19980145280	申请日期	1998.05.27
申请人	SONY CORP	发明人	ISHIYAMA HIROSHI
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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