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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11340568(A)
申请公布日期
1999.12.10
申请号
JP19980140827
申请日期
1998.05.22
申请人
HITACHI LTD
发明人
TANAKA TOSHIAKI
分类号
H01L21/22;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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