| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for preventing sticking of electrodes therebetween. SOLUTION: Many protrusions and recesses in which a width of each recess is 0.01 to 0.1 μm are formed on at least any one surface of opposed surfaces of fixed electrodes 22, 32 and movable electrodes 21, 31 of an acceleration sensor 1. Contact areas between the electrodes 22, 32 and the electrodes 21, 31 are reduced, and a hydrophobic property of the silicon surface becomes strong. Accordingly, stickings both during its process and during its use scarcely occur. |
