Swap out plate and assembly

摘要

A load lock is comprised of a housing defining a partial chamber therein opening to a first face, the load lock defining a given point on which the center of a substrate is supported. A swap out plate is secured to the load lock and covers the first face thereof. The swap out plate defines a partial chamber therein and has a horizontally extending slot communicating with the chamber. A substrate support is secured to the load lock for supporting a substrate thereon such that the supported substrate extends between the swap out plate partial chamber and the load lock partial chamber.