| 摘要 |
PROBLEM TO BE SOLVED: To avoid giving damage to a wafer, by enlarging the allowable error in the vertical direction at the time of arm inserting operation of a wafer carrying equipment. SOLUTION: A wafer carrying equipment is constituted of a wafer pusher 6 pushing out a wafer 9 in a wafer carrier 8, a subarm 2 taking out the wafer from the wafer carrier or accommodating the wafer in the wafer carrier, and a main arm 3 carrying the wafer. At the time of wafer taking-out operation, operation is performed without inserting the arm into the part between a plurality of wafers. |
