EXPOSURE DEVICE AND METHOD,申请号JP19990103819-传众专利搜索

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发明名称	EXPOSURE DEVICE AND METHOD
摘要
申请公布号	JPH11327155(A)	申请公布日期	1999.11.26
申请号	JP19990103819	申请日期	1999.04.12
申请人	NIKON CORP	发明人	SUZUKI KAZUAKI
分类号	H01L21/027;G03F7/20;(IPC1-7):G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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