TRANSPARENT BARRIER FILM AND LAMINATE BODY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To prepare a useful transparent barrier film which does not suffer from yellowing, deterioration or the like and is free from arcing holes using a biaxially stretched polyester-based film by means of the plasma chemical film forming method. SOLUTION: On one surface of a biaxially stretched polyester-based film 2 is formed a thin film 3 of an inorganic oxide by the plasma chemical film forming method under the film forming conditions: the film forming speed is 80-120 m/min; the plasma power is 8-12 kW; the gas flow rates of ingredients in a mixed film forming gas composition comprising a film forming monomer gas, oxygen gas, an inert gas and other gases are such that the film forming monomer gas: oxygen gas: an inert gas = 0.8-1.2 slm: 2.8-3.2 slm: 2.8-3.2 slm, wherein slm denotes standard litter minute; and the degree of vacum in a vacuum chamber is 40-70 pbar.