发明名称 Interferometer with air turbulence compensation
摘要 An improved interferometer measuring system that corrects for errors in the determination of the position of a measurement reflector along a measurement path due to the presence of an atmosphere (e.g. atmospheric turbulence) along the path is disclosed. The system includes a two-wavelength interferometer for measuring the atmosphere and a basic length interferometer for a basic measurement of a change in position of the measurement reflector. A calibration procedure for correcting the basic measurements made by the basic length interferometer uses first and second correction coefficients related to the average refractivity of the atmosphere and the change in the refractivity of the atmosphere, respectively. The coefficients can be determined by interferometric measurements or from a combination of interferometric measurements and data from an atmospheric sensor(s), including a humidity sensor. The two-wavelength interferometer can include a pulsed laser source, a compact reference path element, and path length adjustment element. An algorithm is disclosed for efficiently determining the phase difference between the two beams of the two-wavelength interferometer. Beam combining techniques and apparatus for combining the beams of the two-wavelength interferometer and the basic length measurement interferometer while preserving the polarization of the laser beams are also disclosed. The data obtained from the two-wavelength interferometer can be corrected, based on measurements made by the basic length interferometer, for aging due to the movement of the reflecting mirror subsequent to measurement of the atmosphere by the two-wavelength interferometer.
申请公布号 US5991033(A) 申请公布日期 1999.11.23
申请号 US19970933228 申请日期 1997.09.18
申请人 SPARTA, INC. 发明人 HENSHAW, PHILIP D.;DILLON, ROBERT F.
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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