发明名称 |
Gas containment and delivery system |
摘要 |
A gas containment and delivery system that can be efficiently and cost-effectively adapted to a wide variety of gas delivery needs. The system has a gas containment box that can be efficiently adapted to provide double containment for sections of toxic gas lines having gas delivery components such as valves, regulators, and gauges. The system may be either floor-mounted or wall-mounted, and can be used in a wide variety of semiconductor fabrication facilities.
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申请公布号 |
US5988208(A) |
申请公布日期 |
1999.11.23 |
申请号 |
US19960678375 |
申请日期 |
1996.07.02 |
申请人 |
TUDHOPE, ANDREW;JORDAN, DAVID;JONES, JERRY |
发明人 |
TUDHOPE, ANDREW;JORDAN, DAVID;JONES, JERRY |
分类号 |
F16L35/00;(IPC1-7):F16L3/00 |
主分类号 |
F16L35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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