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发明名称
摘要
申请公布号
JP2976924(B2)
申请公布日期
1999.11.10
申请号
JP19970128757
申请日期
1997.05.19
申请人
NIPPON DENKI KK
发明人
SASAKI NARIHITO
分类号
G01J1/02;C23C14/34;G01J5/02;G01J5/20;H01C7/10;(IPC1-7):G01J5/02
主分类号
G01J1/02
代理机构
代理人
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