| 摘要 |
PROBLEM TO BE SOLVED: To automatically correcting the deviation of laser beam irradiating position and to perform the laser beam machining having high precision by executing the correction of the laser beam irradiating position from image pickup result of a positioning reference mark with an image pickup unit. SOLUTION: A continuing sheet-like material 20 as the material to be machined, has the laser beam machining ranges 20a at the equal interval and stops while conveying at each one pitch with an intermittent conveying mechanism. The continuing sheet-like material 20 is disposed in an X-Y machining plane and the conveying direction of the continuing sheet-like material 20 coincides with an X-axial scanning direction of the laser beam irradiating from a laser beam head 2, i.e., the X direction and a y-axial scanning direction is orthogonally crossed with the conveying direction. The laser beam head 2 is provided with an X-Y galvano-mirror system and a scanning lens for collecting the laser beam irradiating from the X-Y galvano-mirror system. The correction of the laser beam irradiating position is executed from the pickup result of the positioning reference mark 22 with a pickup device 30. A scanning controller 24 and a scanner driver 25 besides a controller 4 for controlling the X-Y galvano- mirror system are arranged. |
