摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a press bonding apparatus for very simply and accurately executing a pressure control in a low pressure area without increasing in size in the case of press bonding by using a press bonding head. SOLUTION: This apparatus is the one for press bonding a pair of objects 3a, 9 in the state that a connecting material 8 is sandwiched between the objects 3a and 9. The apparatus comprises a fluid cylinder 14 having a reciprocating output shaft 14a, a press bonding head 16 supported to the shaft 14a and a controller 21 for controlling movement of the shaft 14a by controlling fluid to be supplied to the cylinder 14. The controller 21 controls the fluid to alleviate a weight of the head 16 when the shaft 14a is forwarded toward the objects 3a, 9. When a fluid pressure supplied to a port 19a is made equal to the weight of the head 16, its weight is completely canceled.</p> |