| 摘要 |
PROBLEM TO BE SOLVED: To omit time and labor for aligning 1st and 2nd detection means even when a focus detection range is wide. SOLUTION: The microscope is provided with an illuminating optical system for irradiating an object 23 to be detected with illumination light through an objective lens 2, a converging optical system 17 for converging the reflected light of illumination light reflected by the object 23 and passed through the lens 2 again, 1st and 2nd detection means 18, 19 for detecting the areas of the reflected light beam converged by the system 17 respectively before and after the focus of the system 17, an operation part 26 for finding out a difference between the areas of the reflected light beams detected by the means 18, 19 and obtaining a focus error signal, and an optical path conversion means 40 is arranged on the upper part of the 1st or 2nd detection means 19 and ranged these means 18, 19 ane arranged on the same plane. |
