CARBON HEATING ELEMENT AND METHOD OF MANUFACTURING THE SAME

摘要

A carbon heating element of excellent durability and thermal shock resistance, usable even in a special environment, for example, even in a strong oxidizing chemical, and having a sufficient capability of generating heat with smaller power consumption. The carbon heating element is formed by covering a carbon material, such as carbon fiber or a carbon fiber cloth with quartz glass, making the interior of the quartz glass vacuous or setting the pressure of the interior of the quartz to not higher than 0.2 atm. with a substituted inert gas, and melt-seal the quartz glass.