| 发明名称 |
DEVICE FOR FIXING SUBSTRATES |
| 摘要 |
The invention relates to a device for fixing substrates, each of which have an inner cavity, with an element which can be introduced into said inner cavity. Said device also has an axially moveable inner member (30) and an outer member (20) which can be expanded by means of a relative movement of the members. |
| 申请公布号 |
WO9956306(A1) |
申请公布日期 |
1999.11.04 |
| 申请号 |
WO1999EP02500 |
申请日期 |
1999.04.14 |
| 申请人 |
STEAG HAMATECH AG;DENZLER, LUDWIG;SPEER, ULRICH;WEBER, KLAUS |
发明人 |
DENZLER, LUDWIG;SPEER, ULRICH;WEBER, KLAUS |
| 分类号 |
G11B7/26;B65G49/07;F16B19/10;G11B17/028;G11B23/00;H01L21/68;H01L21/687 |
主分类号 |
G11B7/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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