SPUTTERING SYSTEM,申请号JP19980107762-传众专利搜索

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法人/股东/高管

发明名称	SPUTTERING SYSTEM
摘要
申请公布号	JPH11302839(A)	申请公布日期	1999.11.02
申请号	JP19980107762	申请日期	1998.04.17
申请人	TOSHIBA CORP	发明人	KAWAKUBO TAKASHI;SANO KENYA;OHARA RYOICHI;ICHIHARA KATSUTARO
分类号	C23C14/22;C23C14/34;C23C14/35;H01J37/34;H01L21/203;H01L39/24;(IPC1-7):C23C14/34	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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