| 摘要 |
PROBLEM TO BE SOLVED: To provide a method by which an integrated thin-film photoelectric converter having a large area can be manufactured highly efficiently and with high accuracy. SOLUTION: In a method for manufacturing an integrated thin-film photoelectric converter, a plurality of linear dividing grooves is formed in parallel with each other at regular intervals W by a laser scribing method for dividing at least one of a first electrode layer, a photoelectric conversion layer, and a second electrode layer successively laminated upon another on an insulating substrate correspondingly to a plurality of photoelectric conversion cells. In a laser scribing method, a plurality of laser beams 11-14 are used by setting the intervals 21-23 between adjacent beams to an integral multiple which is twice or more as broad as the intervals W of the dividing grooves, and the same number of dividing grooves as that of the beams are formed simultaneously, while the beams are displaced in parallel relative to the insulating substrate. |
