SUBSTRATE INSPECTION METHOD AND DEVICE THEREOF,申请号JP19980101230-传众专利搜索

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发明名称	SUBSTRATE INSPECTION METHOD AND DEVICE THEREOF
摘要
申请公布号	JPH11297784(A)	申请公布日期	1999.10.29
申请号	JP19980101230	申请日期	1998.04.13
申请人	MATSUSHITA ELECTRON CORP	发明人	TANAKA TOMOYA
分类号	G01N27/62;G01N1/22;G01N1/28;H01L21/66;(IPC1-7):H01L21/66	主分类号	G01N27/62
代理机构		代理人
主权项
地址

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