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发明名称
Belüftungseinrichtung für Vakuumkammern
摘要
申请公布号
DE19735351(C2)
申请公布日期
1999.10.21
申请号
DE19971035351
申请日期
1997.08.14
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
ERBKAMM, WOLFGANG;KRAUSE, JOCHEN;GAWER, OLAF;HECHT, CHRISTIAN
分类号
B01J3/00;B01J3/02;(IPC1-7):B01J3/02
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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