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发明名称
SCANNING MECHANISM
摘要
申请公布号
JPH11287813(A)
申请公布日期
1999.10.19
申请号
JP19980103892
申请日期
1998.03.31
申请人
HITACHI CONSTR MACH CO LTD
发明人
MURAYAMA TAKESHI;SHIRAI TAKASHI;MORIMOTO TAKASHI;KURODA HIROSHI;ONOZATO AKIMASA;NISHIGAKI TAKESHI
分类号
H01J37/20;G01B21/30;G01N37/00;G01Q10/02;G01Q10/04;G01Q90/00;G05D3/00;(IPC1-7):G01N37/00
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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