发明名称 Method and apparatus for separating composite member using fluid
摘要 <p>Apparatus is provided to separate a composite member consisting of a plurality of bonded members (1 and 2) without destructing or damaging it, a fluid (7) is jetted against the composite member from a nozzle (8) to separate it into a plurality of members (11 and 12) at a position (3) different from a bonding position (14). The apparatus is provided with a holder for supporting and positioning the composite member, and a jet or jets for jetting fluid against the edge surface of the composite member. <IMAGE></p>
申请公布号 SG68035(A1) 申请公布日期 1999.10.19
申请号 SG19980000626 申请日期 1998.03.25
申请人 CANON KABUSHIKI KAISHA 发明人 OHMI KAZUAKI;YONEHARA TAKAO;YANAGITA KIYOFUMI;YANAGITA KAZUTAKA
分类号 H01L21/301;H01L21/00;H01L21/683;(IPC1-7):H01L21/02;B32B31/18;B32B35/00;H01L21/68 主分类号 H01L21/301
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