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发明名称
摘要
申请公布号
JPH11512244(A)
申请公布日期
1999.10.19
申请号
JP19970510850
申请日期
1996.09.03
申请人
发明人
分类号
G01J1/44;H01L27/146;H04N5/33;H04N5/355;(IPC1-7):H04N5/335
主分类号
G01J1/44
代理机构
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