发明名称 |
PRODUCTION OF ELECTRIC CONDUCTIVE CERAMIC SINTERED COMPACT |
摘要 |
PURPOSE:To produce an electric conductive ceramic sintered compact capable of producing a heating element (boat) for evaporating a metal having a long service life. CONSTITUTION:A powdery mixture contg. hexagonal boron nitride powder in which the percentage of >=800Angstrom crystallite sizes is >=50wt.%, titanium diboride powder and aluminum nitride powder is compacted and sintered in a nonoxidizing atmosphere to produce the objective electric conductive ceramic sintered compact used for producing a heating element for evaporating a metal. |
申请公布号 |
JPH07315934(A) |
申请公布日期 |
1995.12.05 |
申请号 |
JP19940111430 |
申请日期 |
1994.05.25 |
申请人 |
DENKI KAGAKU KOGYO KK |
发明人 |
SASAKI YOSHIO;ADACHI KENICHI;IMAMURA YASUO |
分类号 |
H05B3/14;C04B35/58;C04B35/583;C23C14/24 |
主分类号 |
H05B3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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