MIKROMECHANISCHE SENSOREINHEIT ZUM ERKENNEN VON BESCHLEUNIGUNGEN

摘要

A micromechanical sensor unit for detecting acceleration has pendulums each with a spiral spring and a seismic mass. Supports each being connected to a respective one of the pendulums, and position sensors, each two of the position sensors is associated with a respective one of the pendulums. Each position sensor and an associated pendulum form a switch with a defined triggering threshold and at least two switches respond to the same direction of acceleration. At least one switch is a safing sensor with a separate tap of a sensor signal.