Verfahren zur Herstellung von Klein- und Mikroteilen aus Keramik

摘要

The invention relates to a method for producing small and micro-sized ceramic parts by means of lithography. The aim of the invention is to design a method in such a way that ceramic structures with high thermal and mechanical stability can be produced. This is achieved by applying a pre-ceramic polymer containing silicon to a high-temperature resistant substrate, followed by drying at room temperature, pictorial exposure of the substrate coated with the pre-ceramic polymer to electromagnetic radiation (wavelength < 4000 nm), development of the exposed film in an organic solvent, pyrolysis at a temperature of above 900 DEG C and subsequent sintering of the developed plastic film to form a dimensionally stable three-dimensional moulded body at a temperature of above 1600 DEG .