发明名称 |
Deposition of an insulating film comprising carbon |
摘要 |
<p>There is provided a method of fabricating a semiconductor device including an insulating film composed of carbon family material, the method including the steps of (a) depositing an insulating film (103) composed of carbon family material (b) desorbing volatile components out of the insulating film, and (c) depositing a film (104) on the insulating film. For instance, the step (b) is performed by annealing the insulating film in hydrogen atmosphere at a first temperature equal to or greater than a temperature at which the insulating film has been deposited The method suppresses gas from being discharged out of an insulating film without an increase in dielectric constant, and prevents deposited films on the insulating film from being peeled off. <IMAGE></p> |
申请公布号 |
EP0949663(A2) |
申请公布日期 |
1999.10.13 |
申请号 |
EP19990106149 |
申请日期 |
1999.04.07 |
申请人 |
NEC CORPORATION |
发明人 |
ENDO, KAZUHIKO;SHINODA, KEISUKE |
分类号 |
H01L21/768;H01L21/31;H01L21/3105;H01L21/312;H01L21/314;H01L21/316;H01L21/324;H01L23/522;(IPC1-7):H01L21/312 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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