| 摘要 |
PROBLEM TO BE SOLVED: To drive a minute part, improve reliability and reduce costs by alternately arranging a driving part of an alternate layer of a piezoelectric layer and an electrode layer and a non-driving part of an alternate layer of a piezoelectric layer and a void layer and uniting the parts in one body. SOLUTION: A driving part 4 of a rectangular parallelopiped formed alternately with a non-driving part 5 in one body is constructed in an alternate layer structure of PZT piezoelectric layers 6 and electrode layers 7, while the non- driving part 5 has an alternate layer structure of PZT piezoelectric layers 8 and void layers 9. The plurality of electrode layers 7 layered via the piezoelectric layers 8 are alternately exposed at both end faces. External electrodes formed independently for each driving part 4 are electrically connected to end parts of the electrode layers 7 exposed every two layers of the corresponding driving parts 4. External electrodes are formed at the whole of the other end faces and electrically connected to end parts of the whole electrode layers 7 exposed from the plurality of the driving parts 4. These electrodes are formed of gold vapor deposited to end faces of piezoelectric elements. |
