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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11265886(A)
申请公布日期
1999.09.28
申请号
JP19980067373
申请日期
1998.03.17
申请人
ASAHI KASEI MICRO SYST CO LTD
发明人
HORIUCHI KEISUKE
分类号
H01L21/76;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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