| 摘要 |
PROBLEM TO BE SOLVED: To heighten the productivity by increasing a paste application speed, suppressing the vibration of a movable part, and applying excellently a paste pattern in a desired shape by coating. SOLUTION: A simulated coating operation without parting to a dummy substrate (a step 300) according to a paste pattern data is carried out (a step 600). The distance between the nozzle and the substrate is measured (a step 700) by the simulated coating operation and the coating position where a great vibration exceeding the allowance is searched (the step 700). In the case such a coating position exists, the coating speed is corrected only at this coating position to a new coating speed (a step 1100), and at the same time the similar simulated coating operation is carried out at the new coating speed. The simulated coating operation is carried out while successively correcting the coating speed. In such a manner, at the coating position where vibration occurs, coating speed can be set corresponding to the magnitude of the generated vibration, but a coating speed at which no vibration occurs can be set.
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