POWER SUPPLY SYSTEM FOR VACUUM FURNACE,申请号JP19980075031-传众专利搜索

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发明名称	POWER SUPPLY SYSTEM FOR VACUUM FURNACE
摘要
申请公布号	JPH11257867(A)	申请公布日期	1999.09.24
申请号	JP19980075031	申请日期	1998.03.10
申请人	ABIKO KENJI;ULVAC FUAI KK;SHINKO ELECTRIC CO LTD	发明人	ABIKO KENJI;ASHINO YOSHIHIRO;KONO HITOSHI;TSUDA MASANORI;TADOKORO MASAHIRO
分类号	F27B14/14;F27B14/04;F27D11/06;H05B6/02;(IPC1-7):F27B14/14	主分类号	F27B14/14
代理机构		代理人
主权项
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