FINE WORKING METHOD OF THIN FILM,申请号JP19980062524-传众专利搜索

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发明名称	FINE WORKING METHOD OF THIN FILM
摘要
申请公布号	JPH11260799(A)	申请公布日期	1999.09.24
申请号	JP19980062524	申请日期	1998.03.13
申请人	HITACHI LTD	发明人	MIYAZAKI HIROSHI
分类号	H01L21/302;C23F4/00;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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