| 摘要 |
PROBLEM TO BE SOLVED: To obtain a resist stripper contg. no harmful chlorine-contg. org. solvent, having incombustibility and not corroding metallic materials by incorporating a material comprising a benzene ring and azole which shares adjacent carbon atoms in the benzene ring. SOLUTION: A material comprising a benzene ring and azole which shares adjacent carbon atoms in the benzene ring is incorporated into a resist stripper using water as the solvent. Azole is a general term for 5-membered heterocyclic compds. contg. one or more nitrogen atoms in the ring. The material is preferably incorporated into the stripper in the range of 0.01-1.0 mol/l. The objective resist stripper having stable stripping performance comparable to or higher than that of dichloromethane is obtd. Since water is used as the solvent, the stripper is incombustible and does not corrode metallic materials. |
