发明名称 |
USE OF PREDICTIVE PULSE TRIGGERING TO IMPROVE ACCURACY IN LINK PROCESSING |
摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a reduction in capacity of triggering generation of a laser pulse at a desired target as a speed of a laser beam axis is increased, in a link-processing system. <P>SOLUTION: A predictive pulse triggering (PPT) method enables precise triggering of a laser beam 100 in the link-processing system. The PPT method entails triggering the laser beam based on estimated relative motion parameters of the target 106 and the laser beam axis 108. The PPT method allows for a six-fold improvement in laser positioning accuracy over the conventional, entirely measurement-based method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013099784(A) |
申请公布日期 |
2013.05.23 |
申请号 |
JP20120278781 |
申请日期 |
2012.12.21 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES INC |
发明人 |
BRULAND KELLY;VANDERGIESSEN CLINT |
分类号 |
B23K26/00;B23K26/02;H01L21/68 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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