Bistabiler Mikroaktuator mit gekoppelten Membranen,申请号DE1997181928T-传众专利搜索

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发明名称	Bistabiler Mikroaktuator mit gekoppelten Membranen
摘要
申请公布号	DE19781928(T1)	申请公布日期	1999.09.23
申请号	DE1997181928T	申请日期	1997.02.10
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	QUENZER, HANS JOACHIM;WAGNER, BERND
分类号	F04B43/04;F15C5/00;H01H59/00;H02N1/00	主分类号	F04B43/04
代理机构		代理人
主权项
地址

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