Replaceable modular probe head

摘要

A replaceable modular probe head is composed of a plurality of in-parallel probing modules. Each probing module has a plurality of in-series probing regions. In the present embodiment, each probing module has mechanical connection parts on its both ends to attach to a printed circuit board (PCB) to be a multi-DUT probe card. Therefore, the probing module can be replaced individually when probes are damaged or worn without replacing the whole probe head to reduce the fabrication cost of a multi-DUT probe head.