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发明名称
COATING INSTALLATION COMPRISING SEVERAL SEQUENTIALLY DISPOSED COATING CHAMBERS
摘要
申请公布号
KR100813572(B1)
申请公布日期
2008.03.17
申请号
KR20040064334
申请日期
2004.08.16
申请人
发明人
分类号
G01N21/47;G01N21/84;C23C14/54;C23C14/56;G01N21/00;G01N21/55;G01N21/86
主分类号
G01N21/47
代理机构
代理人
主权项
地址
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