发明名称 ABRASIVE CLOTH DRESSER AND MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an abrasive cloth dresser with an excellent pad grinding rate and pad flatness.SOLUTION: An abrasive cloth dresser with a plurality of abrasive grains anchored on a resin layer to project individual grains from the resin layer is characterized in that a dresser reference surface of the resin layer forms a plurality of anchorage surfaces projected in projecting directions of grains to keep individual grains anchored with a part buried in the anchorage surface. Where a height of the anchorage surface is H, a width between a grain end in a horizontal direction orthogonal to a projecting direction and a grain end in the horizontal direction of the anchorage surface with this grain anchored is L, an interval between grains adjacent with each other is L, and the height of a grain in the projecting direction based on the dresser reference surface is H, the condition of 0.2≤L/L≤0.4, 0.4≤H/H≤0.7 is to be satisfied.SELECTED DRAWING: Figure 1
申请公布号 JP2016087735(A) 申请公布日期 2016.05.23
申请号 JP20140224287 申请日期 2014.11.04
申请人 NIPPON STEEL SUMIKIN MATERIALS CO LTD;POLYPLASTICS CO 发明人 SAKAMOTO HIROAKI;KINOSHITA TOSHIYA;ISHIDA ATSUKO
分类号 B24B53/12;B24B37/00;B24D3/00;B24D3/28;H01L21/304 主分类号 B24B53/12
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