发明名称 Cleaning a potassium contaminated surface with pure hot water
摘要 A treating method can effectively and efficiently remove alkali metals including potassium. It cleans an object brought into contact with a potassium-containing treatment agent by holding the object in contact with pure water heated to or above 80 DEG C. <IMAGE>
申请公布号 EP0910116(A3) 申请公布日期 1999.09.08
申请号 EP19980119552 申请日期 1998.10.16
申请人 CANON KABUSHIKI KAISHA 发明人 TADAHIRO, OHMI;MATSUOMI, NISHIMURA;TAKAYUKI, JIZAIMARU
分类号 B08B3/08;H01L21/304;H01L21/306 主分类号 B08B3/08
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