THREE-AXIS ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a three-axis acceleration sensor with improved sensitivity by narrowing the essential total width of a beam for constituting a flexible part. SOLUTION: A flexible part 2 is constituted of two parallel beams 21 and another beam 22 that is formed for connecting base parts at the side of a fixing part, and the width of the essential flexible part 2 is narrowed. A piezo resistor 23 or 24 for x or y axis is formed at the connection site with a connection part 3 of each beam 21, and a piezo resistor 25 for z axis is formed at another beam 22.