| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a holding device for a substrate which does not allow the substrate fall, even if the device is moved at high speed. SOLUTION: Support members 50a and 50b with which a frame part 41a of tweezers is equipped with are provided with a vertical wall 56a at the upper end of a tapered surface 55a and a vertical 56b at the upper end of a tapered surface 55b. Even if the peripheral edge part of a wafer W is lifted along the tapered surface 55a by the tweezers movement, since the peripheral part stops on abutting against the vertical surface 56b, so that the wafer W can be prevented from falling from the tweezers.</p> |
