Mono, di- and trifluoroacetate substituted silanes

摘要

Silane compounds are described having the formula: Si(OR1)a(O2CR2)bFc wherein: R1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R2 is -CH2F, -CHF2 or -CF3; a is 1, 2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4. Methods of making and using these silane compounds in integrated circuit fabrication processes also are described.