| 摘要 |
A substrate transfer robot (1) is equipped with: a robot arm (4) to which a substrate holding section (7) for holding a substrate (S) is displaceably provided; a robot control means (8) that controls operations of the robot arm (4) and the substrate holding section (7); and a substrate detection means (9), which is provided to the robot arm (4), and detects an end portion of the substrate (S) held by the substrate holding section (7). The substrate detection means (9) detects at least two areas of the end portion of the substrate (S) when displacing the substrate holding section (7) with respect to the robot arm (4). The robot control means (8) corrects substrate transfer operations on the basis of results of the detection of the end portion of the substrate (S). Even in the cases where the substrate held by the substrate holding section is shifted from a correct position, the substrate can be transferred without a trouble. |
