发明名称 |
COMPOSITE STRUCTURE AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
A composite structure for electronic components, having a base substrate with a flat side provided with a depression, and having a cover layer which is disposed on the flat side structured by the depression, and the depression being covered to form a hollow structure. The depression in the base substrate is created prior to the deposition of the cover layer and has a clear width measured parallel to the flat side that is less than one-half of its clear depth measured before the cover layer is applied. The vapor phase deposited cover layer is formed from a material which has a sufficiently high surface tension to promote three-dimensional growth of the vapor phase deposited layer. |
申请公布号 |
KR100219018(B1) |
申请公布日期 |
1999.09.01 |
申请号 |
KR19960011346 |
申请日期 |
1996.04.16 |
申请人 |
DAIMLER-BENZ AKTIENGESELLSCHAFT |
发明人 |
FUSSER, HANS-JURGEN;ZACHAI, REINHARD;MUNCH, WOLFRAM;GUTHEI, TIM;FERGUSON, MONA;SCHAUB, REINER;GREEB, KARL-HEINRICH |
分类号 |
C30B29/04;C30B29/06;H01J17/49;H01J19/24;H01J29/04;H01J31/12;H01L21/20;H01L21/314;(IPC1-7):C30B29/04 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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